CHANDRASEKARAN, Ganesh Babu. Motion Control for Semiconductor Equipment: Principles, Architectures, and Precision Engineering. International Journal of Emerging Research in Engineering and Technology, [S. l.], v. 7, n. 2, p. 77–81, 2026. DOI: 10.63282/3050-922X.IJERET-V7I2P111. Disponível em: https://ijeret.org/index.php/ijeret/article/view/573. Acesso em: 3 may. 2026.