CHANDRASEKARAN, Ganesh Babu. Engineering Materials for Semiconductor Manufacturing Equipment: Properties, Applications, and Future Trends. International Journal of Emerging Research in Engineering and Technology, [S. l.], v. 7, n. 2, p. 151–156, 2026. DOI: 10.63282/3050-922X.IJERET-V7I2P119. Disponível em: https://ijeret.org/index.php/ijeret/article/view/588. Acesso em: 19 may. 2026.